I. INTRODUCTIONMicro-electro-mechanical systems (MEMS) is a technology related to micro-scale mechanical and electromechanical devices [1]. In 1959, Richard Feynman introduced the idea of ​​manufacturing small devices in a talk titled "There's Plenty of Room Down Under." Feynman believed that making small devices was possible through the manipulation of atoms and molecules. In 1974, Japanese scientist Norio Taniguchi defined “nanotechnology” as “the processing, separation, consolidation and deformation of materials by an atom or molecule” [2]. MEMS technology differs from nanotechnology in that MEMS elements must have some sort of mechanical component or functionality, and in the fact that MEMS elements are manufactured using microfabrication techniques, as opposed to the method of creation of unique atoms and molecules [1].A major advantage of MEMS technology is that it is very diverse, in the sense that it can create a wide variety of devices. Many MEMS elements can be used as transducers, devices that convert energy from one form to another. MEMS devices can have a wide variety of uses, both on the micro and macro scale, and are quite commonly used in many everyday devices. There are some limitations to MEMS technology, but they are all considered in the design process of MEMS devices. MEMS is an important technology with wide applications and high potential [1].II. FUNDAMENTALSThe design of a specific MEMS device is based on what the device is intended to do. MEMS devices are produced using low-cost batch microfabrication techniques on silicon, much like integrated circuits (ICs). The microfabrication process begins by depositing barrier films, typically composed of silicon dioxide, onto a silicon substrate wafer. Then, a photolithography is carried out. ...... middle of paper ...... phones, but together they can be applied to complex systems such as navigation systems. There are also other applications for MEMS in the areas of communications in RFMEMS and biotechnology in BioMEMS. Although MEMS devices have a variety of applications, there are limitations to the technology that must be considered, such as the difficulty of further shrinking MEMS devices, the fact that the microfabrication processes of MEMS and ICs differ sufficiently so that they must always be manufactured and implemented separately, and the wide variation in the MEMS microfabrication process. Electrical and computer engineers have the responsibility of designing both MEMS devices and the integrated circuits that connect them, while dealing with limitations. Even with these limitations, MEMS technology remains very diverse and is widely applicable to a variety of devices and systems..